High-reflection multilayer for wavelength range of 200-30 nm

Y. Kondo, T. Ejima, K. Saito, T. Hatano, M. Watanabe

    Research output: Contribution to journalArticlepeer-review

    14 Citations (Scopus)

    Abstract

    Composite multilayers consisting of a top single layer and piled double layers with high reflectance through a 200-30 nm wavelength range have been designed and fabricated for normal incidence optical systems and the performance was checked in a 140-30 nm range. The normal incidence reflectance of SiC (top layer)-Y2O3/Mg (double layers) multilayer was more than 14% in a range of 40-30 nm which is much higher than those of W, and 20-40% above 50 nm which is comparable with that of W. The reflectance of SiC (top layer)-Mg/SiC (double layers) multilayer was a little lower than those values.

    Original languageEnglish
    Pages (from-to)333-336
    Number of pages4
    JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
    Volume467-468
    DOIs
    Publication statusPublished - 2001 Jul 21

    Keywords

    • Multilayer
    • Normal incidence
    • Reflectance
    • Reflection coating
    • Vacuum ultraviolet

    ASJC Scopus subject areas

    • Nuclear and High Energy Physics
    • Instrumentation

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