High-rate deposition of YBa2Cu3O7-δ high-temperature superconducting films by IR-laser-assisted chemical vapor deposition

S. Miyata, K. Matsuse, A. Ibi, T. Izumi, Y. Shiohara, Takashi Goto

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)


We applied an infrared- (IR-) laser-assisted chemical vapor deposition technique to YBa2Cu3O7-δ (YBCO) film fabrication in order to enhance the deposition rate to one suitable for commercial applications. IR-laser illumination during deposition effectively suppressed outgrowth of a-axis oriented grains, which strongly diminish the film's current-carrying capacity. As a result, high-performance YBCO films with critical current densities of greater than 1 × 106 A cm -2 were successfully obtained at high deposition rates of up to 58 μm h-1 (∼1 μm min-1) by this method.

Original languageEnglish
Article number045020
JournalSuperconductor Science and Technology
Issue number4
Publication statusPublished - 2013 Apr 1

ASJC Scopus subject areas

  • Ceramics and Composites
  • Condensed Matter Physics
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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