TY - GEN
T1 - High quantum efficiency 200-1000 nm spectral response photodiodes with on-chip multiple high transmittance optical layers
AU - Koda, Yasumasa
AU - Kuroda, Rihito
AU - Sugawa, Shigetoshi
N1 - Publisher Copyright:
© 2014 Crown.
PY - 2014/12/12
Y1 - 2014/12/12
N2 - High quantum efficiency (QE) 200-1000 nm spectral response photodiodes using on-chip multiple high transmittance optical layers are demonstrated for development of a high sensitivity linear photodiode array (PDA). In this paper, seven types of PDs with an optical layer each having a band-pass filter type transmittance are described. A surface photogenerated carrier drift layer is employed to improve internal QE and stability of sensitivity to UV-light. The average QE of 79% for 200-1000 nm and 84% for 200-380 nm were obtained for the fabricated PDs. In addition, after acceleration UV-light exposure, degradation of QE is below 15% and increment of dark current is less than double.
AB - High quantum efficiency (QE) 200-1000 nm spectral response photodiodes using on-chip multiple high transmittance optical layers are demonstrated for development of a high sensitivity linear photodiode array (PDA). In this paper, seven types of PDs with an optical layer each having a band-pass filter type transmittance are described. A surface photogenerated carrier drift layer is employed to improve internal QE and stability of sensitivity to UV-light. The average QE of 79% for 200-1000 nm and 84% for 200-380 nm were obtained for the fabricated PDs. In addition, after acceleration UV-light exposure, degradation of QE is below 15% and increment of dark current is less than double.
KW - On-chip multiple optical layers
KW - Photodiode
KW - Spectroscopy
UR - http://www.scopus.com/inward/record.url?scp=84931049255&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84931049255&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2014.6985340
DO - 10.1109/ICSENS.2014.6985340
M3 - Conference contribution
AN - SCOPUS:84931049255
T3 - Proceedings of IEEE Sensors
SP - 1664
EP - 1667
BT - IEEE SENSORS 2014, Proceedings
A2 - Arregui, Francisco J.
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 13th IEEE SENSORS Conference, SENSORS 2014
Y2 - 2 November 2014 through 5 November 2014
ER -