High quality YBaCuO thin film growth by low-temperature metalorganic chemical vapor deposition using nitrous oxide

Hideaki Zama, Jun Saga, Takeo Hattori, Shunri Oda

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    Low-temperature growth of YBa2Cu3Ox films by metalorganic chemical vapor deposition using N2O as an oxidizing agent has been investigated. We have deposited superconducting YBa2Cu3Ox on (100)MgO substrates at 500°C for the first time. Films of 15nm-thick show zero-resistivity critical temperature of 80K. Films of as thin as three unit-cell-thick reveal the superconducting onset characteristics. This result suggests that superconductivity is arisen even from effectively monomolecular layer of YBa2Cu3Ox when we take into account monomolecular buffer layer and monomolecular cap layer. YBa2 Cu3Ox films of 9nm-thick grown on (100)SrTiO3 at 600°C with Tc (zero) of 79K and with peak to valley roughness fluctuation of two unit-cell have been obtained.

    Original languageEnglish
    Title of host publicationMetal-Organic Chemical Vapor Deposition of Electronic Ceramics
    EditorsSeshu B. Desu, David B. Beach, Bruce W. Wessels, Suleyman Gokoglu
    PublisherPubl by Materials Research Society
    Pages291-296
    Number of pages6
    ISBN (Print)1558992340
    Publication statusPublished - 1994 Jan 1
    EventProceedings of the 1993 Fall Meeting of the Materials Research Society - Boston, MA, USA
    Duration: 1993 Nov 291993 Dec 3

    Publication series

    NameMaterials Research Society Symposium Proceedings
    Volume335
    ISSN (Print)0272-9172

    Other

    OtherProceedings of the 1993 Fall Meeting of the Materials Research Society
    CityBoston, MA, USA
    Period93/11/2993/12/3

    ASJC Scopus subject areas

    • Materials Science(all)
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

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