High Q SAW resonator using upper-electrodes on grooved-electrodes in LiTaO3

Tetsuya Kimura, Michio Kadota, Yasuyuki Ida

Research output: Chapter in Book/Report/Conference proceedingConference contribution

23 Citations (Scopus)

Abstract

AI-electrodes on 36-48°YX-LiTaO3substrates have been widely used in surface acoustic wave (SAW) filters and SAW duplexers because of having an optimum electromechanical coupling factor, reflection coefficient and good Qfactor. In this paper, authors proposed and constructed a new SAW structure composed of upper AI-electrodes accumulated on lower grooved Cu-electrodes in the LiTaO3substrate, which has approximately same electro-mechanical coupling factor and reflection coefficient as the AI-electrodes (01λ°YX-LiTaO3in order to realize high Q-factor. As the result, the SAW resonator having superior Q-factor was realized compared with that of AIelectrodes( O.1A.)/42°YX-LiTaO3 substrates.

Original languageEnglish
Title of host publication2010 IEEE MTT-S International Microwave Symposium, MTT 2010
Pages1740-1743
Number of pages4
DOIs
Publication statusPublished - 2010 Oct 15
Event2010 IEEE MTT-S International Microwave Symposium, MTT 2010 - Anaheim, CA, United States
Duration: 2010 May 232010 May 28

Other

Other2010 IEEE MTT-S International Microwave Symposium, MTT 2010
CountryUnited States
CityAnaheim, CA
Period10/5/2310/5/28

Keywords

  • Grooved electrodes
  • LiTaO resonator
  • SAW

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'High Q SAW resonator using upper-electrodes on grooved-electrodes in LiTaO<sub>3</sub>'. Together they form a unique fingerprint.

Cite this