High-precision spin coater for a synchrotron radiation in situ GISAXS system: For the investigation of formation mechanisms of self-assembled structures in polymer thin films

Hiroki Ogawa, Tsukasa Miyazaki, Keisuke Shimokita, Akihiko Fujiwara, Mikihito Takenaka, Tatsuya Yamada, Yasunori Sugihara, Masaki Takata

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

A high-precision spin-coater system has been developed for the investigation of formation mechanisms of self-assembled structures in polymer thin films. The spin coater was designed to have small axial deflection (<2.6μm at the maximum speed of 2000rmin-1) during rotation in order to maintain the relative position with respect to the incident X-ray beam, and to be compact (70mm) in height to facilitate incorporation into an in situ synchrotron radiation grazing-incidence small-angle X-ray scattering (GISAXS) system. The first results of simultaneous measurements on the morphology and film thickness of a triblock copolymer with time resolution of 64ms during thin-film formation at 2000rmin-1 provide indispensable information for understanding the vertically grown lamellar structure on the film surface.

Original languageEnglish
Pages (from-to)1610-1615
Number of pages6
JournalJournal of Applied Crystallography
Volume46
Issue number6
DOIs
Publication statusPublished - 2013 Dec 1
Externally publishedYes

Keywords

  • Grazing-incidence small-angle scattering
  • Polymer thin films
  • Spin coating

ASJC Scopus subject areas

  • Biochemistry, Genetics and Molecular Biology(all)

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