TY - JOUR
T1 - High-precision local C-V mapping for ferroelectrics using principal component analysis
AU - Hiranaga, Yoshiomi
AU - Mimura, Takanori
AU - Shimizu, Takao
AU - Funakubo, Hiroshi
AU - Cho, Yasuo
N1 - Funding Information:
This work was supported in part by a Grant-in-Aid for Scientific Research (16H06360, 18K04932) from the Japan Society for the Promotion of Science (JSPS).
Publisher Copyright:
© 2021 The Japan Society of Applied Physics.
PY - 2021/11
Y1 - 2021/11
N2 - Local C-V mapping based on scanning nonlinear dielectric microscopy (SNDM) is a useful tool for characterizing ferroelectric domain dynamics at the nanoscale. In this study, we realized high-precision C-V mapping through an improved measurement system that introduces a digitizer and post-signal processing. Coupled with the high capacitance detection sensitivity of SNDM, nontrivial patterns corresponding to the polarization response were observed even in harmonic images with an order as high as thirty. Using these high-order harmonic components for the C-V curve resynthesis led to improved measurement accuracy. In addition, further improvement was achieved by introducing noise reduction based on principal component analysis. From the C-V curves resynthesized in this manner, parameters that represent the curve features could be extracted and subsequently displayed in two-dimensional maps. Detailed analyses of the datasets obtained with a ferroelectric HfO2 film revealed interesting distributions concerning local polarization switching dynamics.
AB - Local C-V mapping based on scanning nonlinear dielectric microscopy (SNDM) is a useful tool for characterizing ferroelectric domain dynamics at the nanoscale. In this study, we realized high-precision C-V mapping through an improved measurement system that introduces a digitizer and post-signal processing. Coupled with the high capacitance detection sensitivity of SNDM, nontrivial patterns corresponding to the polarization response were observed even in harmonic images with an order as high as thirty. Using these high-order harmonic components for the C-V curve resynthesis led to improved measurement accuracy. In addition, further improvement was achieved by introducing noise reduction based on principal component analysis. From the C-V curves resynthesized in this manner, parameters that represent the curve features could be extracted and subsequently displayed in two-dimensional maps. Detailed analyses of the datasets obtained with a ferroelectric HfO2 film revealed interesting distributions concerning local polarization switching dynamics.
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U2 - 10.35848/1347-4065/ac13d9
DO - 10.35848/1347-4065/ac13d9
M3 - Article
AN - SCOPUS:85112866583
VL - 60
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - SF
M1 - SFFB09
ER -