High power electrostatic motor with micropatterned electret on shrouded turbine

Takashi Genda, Shuji Tanaka, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

This paper describes the fabrication process of a shrouded turbine and surface modification using fluorinated silane coupling agents to stabilize the charges of a silicon-dioxide electret. The shrouded turbine was fabricated by cavity-through etching, which is deep reactive ion etching (DRIE) through a wafer having cavities made by DRIE and fusion bonding. By using this process, a shrouded turbine with little eccentricity was obtained without damaging the inner structures such as blades and flow ways. Charge stability of electrets was deteriorated by miniaturizing the size. The charge deterioration was caused by leak current through the surface. To decrease the surface conduction, the surface was terminated by fluorine with silane coupling agents. As a result, the charge stability of a silicon-dioxide electret was improved by 100 times compared with HMDS (hexamethyldisilazane) treatment.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages709-712
Number of pages4
DOIs
Publication statusPublished - 2005 Nov 9
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume1

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

Keywords

  • Charge stability
  • Electret
  • Gas turbine
  • Micromotor
  • Shrouded turbine

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Genda, T., Tanaka, S., & Esashi, M. (2005). High power electrostatic motor with micropatterned electret on shrouded turbine. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 709-712). [2E4.64] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1). https://doi.org/10.1109/SENSOR.2005.1496515