High-Performance Self-Aligned SiGeC HBT with Selectively Grown Si 1-x-yGexCy Base by UHV/CVD

Katsuya Oda, Eiji Ohue, Isao Suzumura, Reiko Hayami, Akihiro Kodama, Hiromi Shimamoto, Katsuyoshi Washio

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Fingerprint

Dive into the research topics of 'High-Performance Self-Aligned SiGeC HBT with Selectively Grown Si 1-x-yGexCy Base by UHV/CVD'. Together they form a unique fingerprint.

Engineering

Physics

Chemistry

Chemical Engineering

Material Science