High performance poly-Si thin film transistor with one-dimensionally long Si grains using DLB continuous-wave laser lateral crystallization

Masayuki Yamano, Shin Ichiro Kuroki, Tadashi Sato, Koji Kotani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

One-dimensionally very large silicon grains with a length of over 100 μm were formed by continuous-wave laser crystallization with double-line spot. The laterally crystallized Si thin films have a preferential orientation of (110) plane. Poly-Si TFTs with one-dimensionally long silicon grains were also fabricated with low-temperature (550°C), metal gate self-aligned process. And high electron field effect mobility of 450 cm2/Vs was achieved.

Original languageEnglish
Title of host publicationProceedings of the 20th International Workshop on Active-Matrix Flatpanel Displays and Devices
Subtitle of host publicationTFT Technologies and FPD Materials, AM-FPD 2013
Pages199-202
Number of pages4
Publication statusPublished - 2013 Nov 22
Event20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013 - Kyoto, Japan
Duration: 2013 Jul 22013 Jul 5

Publication series

NameProceedings of the 20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013

Other

Other20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013
CountryJapan
CityKyoto
Period13/7/213/7/5

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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  • Cite this

    Yamano, M., Kuroki, S. I., Sato, T., & Kotani, K. (2013). High performance poly-Si thin film transistor with one-dimensionally long Si grains using DLB continuous-wave laser lateral crystallization. In Proceedings of the 20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013 (pp. 199-202). [6617815] (Proceedings of the 20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013).