TY - GEN
T1 - High performance nonlinear micro energy harvester integrated with (K, Na)NbO3/Si composite quad-cantilever
AU - Van Minh, Le
AU - Hara, Motoaki
AU - Kuwano, Hiroki
PY - 2014/1/1
Y1 - 2014/1/1
N2 - We developed a lead-free (K, Na)NbO3 nonlinear micro energy harvester. The harvester was densely integrated with a quatrefoil-shaped proof mass and quad-cantilevers using bulk micromachining. The KNN/Si composite cantilever was integrated with two-separated metal (Pt/Ti)/ KNN/ metal (Pt/Ti) structure to effectively collect charge. Clamped-clamped beam design was also adopted for wide band operation. The harvester showed wide bandwidth of 253 Hz (fractional bandwidth: 12.9%) at acceleration of 6 m/s2. The power density of 1623 μW/cm3 was achieved at the same acceleration. It is the highest value among the wide bandwidth piezoelectric energy harvesters.
AB - We developed a lead-free (K, Na)NbO3 nonlinear micro energy harvester. The harvester was densely integrated with a quatrefoil-shaped proof mass and quad-cantilevers using bulk micromachining. The KNN/Si composite cantilever was integrated with two-separated metal (Pt/Ti)/ KNN/ metal (Pt/Ti) structure to effectively collect charge. Clamped-clamped beam design was also adopted for wide band operation. The harvester showed wide bandwidth of 253 Hz (fractional bandwidth: 12.9%) at acceleration of 6 m/s2. The power density of 1623 μW/cm3 was achieved at the same acceleration. It is the highest value among the wide bandwidth piezoelectric energy harvesters.
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U2 - 10.1109/MEMSYS.2014.6765660
DO - 10.1109/MEMSYS.2014.6765660
M3 - Conference contribution
AN - SCOPUS:84898972977
SN - 9781479935086
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 397
EP - 400
BT - MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Y2 - 26 January 2014 through 30 January 2014
ER -