High performance nonlinear micro energy harvester integrated with (K, Na)NbO3/Si composite quad-cantilever

Le Van Minh, Motoaki Hara, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

We developed a lead-free (K, Na)NbO3 nonlinear micro energy harvester. The harvester was densely integrated with a quatrefoil-shaped proof mass and quad-cantilevers using bulk micromachining. The KNN/Si composite cantilever was integrated with two-separated metal (Pt/Ti)/ KNN/ metal (Pt/Ti) structure to effectively collect charge. Clamped-clamped beam design was also adopted for wide band operation. The harvester showed wide bandwidth of 253 Hz (fractional bandwidth: 12.9%) at acceleration of 6 m/s2. The power density of 1623 μW/cm3 was achieved at the same acceleration. It is the highest value among the wide bandwidth piezoelectric energy harvesters.

Original languageEnglish
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages397-400
Number of pages4
ISBN (Print)9781479935086
DOIs
Publication statusPublished - 2014 Jan 1
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: 2014 Jan 262014 Jan 30

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
CountryUnited States
CitySan Francisco, CA
Period14/1/2614/1/30

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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