High performance nonlinear micro energy harvester integrated with (K, Na)NbO3/Si composite quad-cantilever

Le Van Minh; Motoaki Hara; Hiroki Kuwano

doi:10.1109/MEMSYS.2014.6765660

High performance nonlinear micro energy harvester integrated with (K, Na)NbO₃/Si composite quad-cantilever

Le Van Minh, Motoaki Hara, Hiroki Kuwano

New Industry Creation Hatchery Center (NICHe)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

We developed a lead-free (K, Na)NbO₃ nonlinear micro energy harvester. The harvester was densely integrated with a quatrefoil-shaped proof mass and quad-cantilevers using bulk micromachining. The KNN/Si composite cantilever was integrated with two-separated metal (Pt/Ti)/ KNN/ metal (Pt/Ti) structure to effectively collect charge. Clamped-clamped beam design was also adopted for wide band operation. The harvester showed wide bandwidth of 253 Hz (fractional bandwidth: 12.9%) at acceleration of 6 m/s². The power density of 1623 μW/cm³ was achieved at the same acceleration. It is the highest value among the wide bandwidth piezoelectric energy harvesters.

Original language	English
Title of host publication	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	397-400
Number of pages	4
ISBN (Print)	9781479935086
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765660
Publication status	Published - 2014 Jan 1
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States Duration: 2014 Jan 26 → 2014 Jan 30

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country	United States
City	San Francisco, CA
Period	14/1/26 → 14/1/30

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2014.6765660

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Van Minh, L., Hara, M., & Kuwano, H. (2014). High performance nonlinear micro energy harvester integrated with (K, Na)NbO₃/Si composite quad-cantilever. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 397-400). [6765660] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765660

High performance nonlinear micro energy harvester integrated with (K, Na)NbO₃/Si composite quad-cantilever. / Van Minh, Le; Hara, Motoaki; Kuwano, Hiroki.

MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 397-400 6765660 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Van Minh, L, Hara, M & Kuwano, H 2014, High performance nonlinear micro energy harvester integrated with (K, Na)NbO₃/Si composite quad-cantilever. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765660, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 397-400, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765660

Van Minh L, Hara M, Kuwano H. High performance nonlinear micro energy harvester integrated with (K, Na)NbO₃/Si composite quad-cantilever. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 397-400. 6765660. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2014.6765660

Van Minh, Le ; Hara, Motoaki ; Kuwano, Hiroki. / High performance nonlinear micro energy harvester integrated with (K, Na)NbO₃/Si composite quad-cantilever. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 397-400 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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