High performance and miniature surface acoustic wave devices with excellent temperature stability using high density metal electrodes

Michio Kadota

Research output: Chapter in Book/Report/Conference proceedingConference contribution

32 Citations (Scopus)

Abstract

Currently, miniature surface acoustic wave (SAW) devices (filters and duplexers) with a good temperature stability are strongly required. In order to realize its requirement, various SAW substrates combining a high density metal electrode and a substrate were researched. Combination of SAW substrates using high density metal electrodes offers excellent properties such as large electrode reflection coefficient, large mechanical coupling factor, low velocity, and good temperature stability. This paper reviews following application of their structures for the realization of miniature SAW devices with low insertion loss and good temperature stability from various aspects: Intermediate frequency (IF) filters in mobile phones using an shear horizontal (SH) wave propagating on the high density metal electrode on ST-90ÆX quartz substrate, SAW duplexers for personal communication service system in the United States (US-PCS) and wide band code division multiple access system (W-CDMA) using LSAW on a flattened SiO2 film on high density metal electrodes on LiTaO3 or LiNbO3 substrates, and radio frequency (RF) filters using SH type of elastic boundary wave (EBW) propagating on SiO2 film on high density metal electrode on LiNbO3.

Original languageEnglish
Title of host publication2007 IEEE Ultrasonics Symposium Proceedings, IUS
Pages496-506
Number of pages11
DOIs
Publication statusPublished - 2007 Dec 1
Event2007 IEEE Ultrasonics Symposium, IUS - New York, NY, United States
Duration: 2007 Oct 282007 Oct 31

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Other

Other2007 IEEE Ultrasonics Symposium, IUS
CountryUnited States
CityNew York, NY
Period07/10/2807/10/31

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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