High-mobility organic thin-film transistors with photolithographically patterned top contacts

Ute Zschieschang, Nis Hauke Hansen, Jens Pflaum, Tatsuya Yamamoto, Kazuo Takimiya, Hirokazu Kuwabara, Masaaki Ikeda, Tsuyoshi Sekitani, Takao Someya, Hagen Klauk

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Due to its large-area capability and high resolution, photolithography is the preferred patterning method for pentacene thin-film transistors (TFTs) for display and circuit applications [1,2]. Since the morphology of thin pentacene films is very sensitive to solvents and heat [3,4], the photolithographic patterning of the source/drain contacts is ideally performed prior to the pentacene deposition, which explains the general preference for the bottom-contact (coplanar) TFT structure. However, as experiments [5] and simulations [6,7] have shown, the bottom-contact TFT structure is associated with substantially larger contact resistance than the top-contact (staggered) structure, which means that for the same channel length, top-contact TFTs are expected to provide larger transconductance and higher cutoff frequency than bottom-contact TFTs. Here we report on organic TFTs with Au top contacts patterned by ordinary photolithography and wet etching (using common solvents, photoresists, and etchants) having field-effect mobilities (0.4 cm 2/Vs) and on/off current ratios (107) similar to those of optimized bottom-contact pentacene TFTs [1,2,5].

Original languageEnglish
Title of host publication69th Device Research Conference, DRC 2011 - Conference Digest
Pages57-58
Number of pages2
DOIs
Publication statusPublished - 2011 Dec 1
Externally publishedYes
Event69th Device Research Conference, DRC 2011 - Santa Barbara, CA, United States
Duration: 2011 Jun 202011 Jun 22

Publication series

NameDevice Research Conference - Conference Digest, DRC
ISSN (Print)1548-3770

Other

Other69th Device Research Conference, DRC 2011
CountryUnited States
CitySanta Barbara, CA
Period11/6/2011/6/22

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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  • Cite this

    Zschieschang, U., Hansen, N. H., Pflaum, J., Yamamoto, T., Takimiya, K., Kuwabara, H., Ikeda, M., Sekitani, T., Someya, T., & Klauk, H. (2011). High-mobility organic thin-film transistors with photolithographically patterned top contacts. In 69th Device Research Conference, DRC 2011 - Conference Digest (pp. 57-58). [5994449] (Device Research Conference - Conference Digest, DRC). https://doi.org/10.1109/DRC.2011.5994449