High-k dielectics integration prospects

S. Kubicek, S. Van Elshocht, A. Delabie, K. Yamamoto, S. Beckx, M. Claes, N. Van Hoornick, D. H. Kwak, S. Hyun, A. Rothschild, A. Veloso, K. Anil, G. Lujan, J. A. Kittl, A. Lauwers, V. Kaushik, M. Niwa, S. De Gendt, M. Heyns, M. JurczakS. Biesemans

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Engineering & Materials Science