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High-Gauge Factor Strain Sensor Based on Piezoelectric Aluminum Nitride Coupled to MOSFET
Minjie Zhu, Naoki Inomata, Nobuyoshi Adachi, Atsushi Sakurai, Masanobu Nomura, Takahito Ono
Research output: Contribution to journal › Article › peer-review
11
Citations
(Scopus)