TY - JOUR
T1 - High-frequency surface acoustic wave resonator filter composed of ZnO/high-density electrode/quartz structure
AU - Kadota, Michio
AU - Nakao, Takeshi
AU - Murata, Takaki
AU - Matsuda, Kenji
PY - 2009/7/1
Y1 - 2009/7/1
N2 - In this paper, we describe the development of a radio frequency (RF) narrow-band surface acoustic wave (SAW) resonator filter composed of a ZnO/high-density metal electrode/quartz structure. First, theoretical analyses were performed to obtain a sufficient reflection coefficient and an appropriate electromechanical coupling factor, where ZnO thickness, type of electrode material, electrode thickness, and metallization ratio were used as variables. Second, one-port SAW resonators were fabricated to confirm the results of the above calculation, and a good agreement between the calculation and measurement results was obtained. Next, an RF narrow-band SAW resonator filter consisting of ZnO/Au interdigital transducer (IDT)/32° YX quartz was fabricated, and a minimum insertion loss of 2.08 dB, a -3dB bandwidth of 3.9 MHz (0.054%), and an excellent temperature coefficient of frequency (TCF) of 4.0ppm/°C were simultaneously achieved.
AB - In this paper, we describe the development of a radio frequency (RF) narrow-band surface acoustic wave (SAW) resonator filter composed of a ZnO/high-density metal electrode/quartz structure. First, theoretical analyses were performed to obtain a sufficient reflection coefficient and an appropriate electromechanical coupling factor, where ZnO thickness, type of electrode material, electrode thickness, and metallization ratio were used as variables. Second, one-port SAW resonators were fabricated to confirm the results of the above calculation, and a good agreement between the calculation and measurement results was obtained. Next, an RF narrow-band SAW resonator filter consisting of ZnO/Au interdigital transducer (IDT)/32° YX quartz was fabricated, and a minimum insertion loss of 2.08 dB, a -3dB bandwidth of 3.9 MHz (0.054%), and an excellent temperature coefficient of frequency (TCF) of 4.0ppm/°C were simultaneously achieved.
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U2 - 10.1143/JJAP.48.07GG03
DO - 10.1143/JJAP.48.07GG03
M3 - Article
AN - SCOPUS:72049119357
SN - 0021-4922
VL - 48
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 7 PART 2
M1 - 07GG03
ER -