High-frequency surface acoustic wave resonator filter composed of ZnO/high-density electrode/quartz structure

Michio Kadota, Takeshi Nakao, Takaki Murata, Kenji Matsuda

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

In this paper, we describe the development of a radio frequency (RF) narrow-band surface acoustic wave (SAW) resonator filter composed of a ZnO/high-density metal electrode/quartz structure. First, theoretical analyses were performed to obtain a sufficient reflection coefficient and an appropriate electromechanical coupling factor, where ZnO thickness, type of electrode material, electrode thickness, and metallization ratio were used as variables. Second, one-port SAW resonators were fabricated to confirm the results of the above calculation, and a good agreement between the calculation and measurement results was obtained. Next, an RF narrow-band SAW resonator filter consisting of ZnO/Au interdigital transducer (IDT)/32° YX quartz was fabricated, and a minimum insertion loss of 2.08 dB, a -3dB bandwidth of 3.9 MHz (0.054%), and an excellent temperature coefficient of frequency (TCF) of 4.0ppm/°C were simultaneously achieved.

Original languageEnglish
Article number07GG03
JournalJapanese journal of applied physics
Volume48
Issue number7 PART 2
DOIs
Publication statusPublished - 2009 Jul 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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