High-Frequency Resonator Using A1 Lamb Wave Mode in LiTaO3 Plate

Najoua Assila, Michio Kadota, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

Acoustic wave devices utilizing plate waves in thin lithium tantalate (LiTaO3) have the potential of achieving high resonance frequency with a suitable electromechanical coupling factor and a relatively small temperature coefficient of frequency (TCF). The influence of Euler angle and plate thickness on the characteristics of plate waves has been investigated. High-frequency resonators using first antisymmetric Lamb wave mode (A1) in (0°, 42°, 0°) LiTaO3 thin plates have been fabricated and optimized. The resonance frequency is as high as 5 GHz, with a relative bandwidth of 7.3% and an impedance ratio of 72 dB. Finally, the TCF of (0°, 42°, 0°) LiTaO3 has been evaluated. Therefore, it is proved that A1 Lamb wave mode propagating in LiTaO3 at a Euler angle close to (0°, 42°, 0°) is suitable for high-frequency devices.

Original languageEnglish
Article number8737999
Pages (from-to)1529-1535
Number of pages7
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume66
Issue number9
DOIs
Publication statusPublished - 2019 Sep

Keywords

  • High frequency
  • Lamb waves
  • LiTaOâ
  • resonator
  • temperature coefficient of frequency (TCF)

ASJC Scopus subject areas

  • Instrumentation
  • Acoustics and Ultrasonics
  • Electrical and Electronic Engineering

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