High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE

In this work, high-frequency one-chip multichannel quartz crystal microbalance (QCM) prepared by deep reactive ion etching (RIE) is presented. The quartz resonators in one-chip with the diameter in the range 0.05-1.0 mm and thickness in the range 18-82 μm were fabricated. The conductance measurements have shown that Q-factor of the resonators increases with decreasing quartz resonator thickness and reaches the value of about 30,000 for the 94 MHz quartz resonator. By decreasing the thickness, very small resonator with 100 μm diameter can be performed with Q-factor of 5700. The separation of spurious modes from fundamental mode is improved by reducing the diameters of the quartz resonators. The influence of the loading glycerol/water mixtures into the electrical properties of the sensor was conducted.