High frequency lamb wave resonator using LiNbO3 crystal thinplate and application to tunable filter

Michio Kadota, Takashi Ogami

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

A cognitive radio system using a frequency from 400 MHz to 6 GHz requirestunable filters with a wide variable frequency range. The cognitive radio alsorequires a tunable filter in high frequency such as 5 to 6 GHz among them. Ultrawide band resonators are effective to realize their tunable filters. A Lambwave on a LiNbO3 this plate having a high velocity and a largeelectro-mechanical coupling factor is suitable for their resonators. Ultra wideband resonator in high frequency requires an optimum large reflectioncoefficient and a substrate with a large electro-mechanical coupling factor anda high velocity. This time, authors attempt to fabricate a higher frequency Lambwave resonator on a LiNbO3 single crystal thin plate instead of theLiNbO3 thin film, though it has been considered that it is difficultto make a very thin LiNbO3 plate such as thinner than 1 m. A newone-port Lamb wave resonator was fabricated on an Al-electrode/ LiNbO3crystal thin plate/air gap/Si substrate with the plate thickness of 0.15(actual thickness395 nm). It showed a high resonant frequency (fr) of 5.44 GHz,a high anti-resonant one (fa) of 6.09 GHz, a wide band-width of 12%, and a largeimpedance ratio of 62 dB at the fr and the fa. Moreover, the authors attemptedto construct theoretically the ladder type of tunable filter using this Lambwave resonators. The filter with the tunable range of 9% from 5.58 to 6.06 GHzhave been obtained.

Original languageEnglish
Title of host publication2010 IEEE International Ultrasonics Symposium, IUS 2010
Pages962-965
Number of pages4
DOIs
Publication statusPublished - 2010 Dec 1
Event2010 IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States
Duration: 2010 Oct 112010 Oct 14

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117

Other

Other2010 IEEE International Ultrasonics Symposium, IUS 2010
CountryUnited States
CitySan Diego, CA
Period10/10/1110/10/14

Keywords

  • 5GHzrange High Frequency
  • Lamb Wave Resonator
  • LiNbO Crystal Plate
  • Tunable Filter
  • Wide band

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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