High frequency lamb wave resonator using LiNbO3 thin film by CVD

Michio Kadota, Takashi Ogami, Kansho Yamamoto, Hikari Tochishita

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

It has been considered that it is difficult to realize higher frequency devices than 3 GHz by using conventional surface acoustic wave (SAW) substrate. In order to realize a high frequency device, there are some methods such as using a high velocity substrate or shortening a wavelength (λ) of an interdigital transducer (IDT). However, almost of all conventional SAW substrates have a low velocity and it is difficult to shorten the λ of IDT because of too narrow fingers. A Lamb wave has a high velocity and a large coupling factor when a LiNbO3 plate is thiner than 0.2λ. As it is difficult to realize a very thin LiNbO3 crystal plate, author use a thin epitaxial LiNbO3 film deposited by a chemical vapor deposition (CVD). As the result, authors realized a high frequency 4.5 GHz of Lamb wave resonator composed of an electrode/thin epitaxial LiNbO3 film/air gap/base-substrate for the first time. The resonator showed a high velocity of 14,000 m/s, a large impedance ratio of 52 dB, and a wide bandwidth of 7.2 % without spurious response due to SH0 mode.

Original languageEnglish
Title of host publication2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum
Pages75-78
Number of pages4
DOIs
Publication statusPublished - 2009 Nov 19
Event2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum - Besancon, France
Duration: 2009 Apr 202009 Apr 24

Publication series

Name2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum

Other

Other2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum
CountryFrance
CityBesancon
Period09/4/2009/4/24

Keywords

  • 4.5GHz
  • CVD
  • Lamb wave
  • LiNbO film
  • Resonator
  • Twin epitaxial

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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