High frequency lamb wave device composed of LiNbO3 thin film

Michio Kadota, Takashi Ogami, Kansho Yamamoto, Yasuhiro Negoro, Hikari Tochishita

Research output: Contribution to journalConference articlepeer-review

13 Citations (Scopus)

Abstract

The Lamb wave type of high frequency resonator proposed. But any Lamb wave resonator operating really 3 GHz, which is difficult to be realized with conventional acoustic wave (SAW), have been not reported. Authors tried to realize the high frequency device by using A1 mode of Lamb wave propagating in the X-axis direction on Zcut LiNbO3 film deposited by chemical vapor deposition (CVD) having high velocity and high electromechanical factor. As the result, authors have realized a 4.5 GHz frequency Lamb wave resonator with high velocity of 14,000 m/s, large impedance ratio of 52dB, and wide bandwidth of 7.2 % composed of thin LiNbO3 epitaxial film/air-gap/substrate for first time. Also it is found that the thin LiNbO3 film is twined . It is confirmed theoretically and experimentally that the responses such as SH0 mode can not be excited because twined crystal effect.

Original languageEnglish
Article number4803205
Pages (from-to)1940-1943
Number of pages4
JournalProceedings - IEEE Ultrasonics Symposium
DOIs
Publication statusPublished - 2008 Dec 1
Event2008 IEEE International Ultrasonics Symposium, IUS 2008 - Beijing, China
Duration: 2008 Nov 22008 Nov 5

Keywords

  • High frequency
  • Lamb wave
  • LiNbO
  • Twined crystal

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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