For developing magnetic materials working in GHz ranges, the soft magnetic properties and high frequency characteristics were examined in as-deposited FeCoBN thin films fabricated by a reactive rf magnetron sputtering method. As a result, these films exhibited high ferromagnetic resonance frequency of 1.5-4 GHz and good soft magnetic properties, such as 4πMs of 17 - 21 kG, ρ of 50 - 220 μΩ cm, Hc of 3-90 Oe and Hk of 20-180 Oe. These magnetic properties of the films were discussed related to the microstructures.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics