A two-dimensional subwavelength grating (SWG) has been fabricated on a GaAlAs light-emitting diode (LED). The SWG is patterned by electron beam lithography and etched by fast atom beam with Cl2 and SF6 gases. The fabricated grating has 200-nm period and the tapered grating shape with aspect ratio of 1.38 to prevent reflection in the spectral region including 850 nm light emission. The emission is increased by 21.6% at the normal emission angle. The total emittance is increased by 60% with the SWG in comparison with that of the flat surface.
- Electron beam lithography
- Light-emitting diodes
- Periodic structures
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering