HIGH-EFFICIENCY LONG-PULSE XECL LASER WITH SIMPLE CONFIGURATION AND EFFICIENT LINE NARROWING.

M. Sugii, M. Ando, O. Sugihara, A. Watanabe, K. Sasaki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Long optical-pulse durations of more than 50 ns with high specific energy are required to operate a small excimer laser oscillator with a narrow linewidth. The authors have demonstrated long-pulsed operation of a discharge-pumped XeCl laser using inductors with no degradation of specific energy or efficiency. An efficient line narrowing of the 0. 0002-angstrom bandwidth with a relatively high-output energy of 4 mJ was also achieved using this device.

Original languageEnglish
Title of host publicationUnknown Host Publication Title
PublisherOptical Soc of America
Number of pages1
ISBN (Print)0936659491
Publication statusPublished - 1987 Jan 1

ASJC Scopus subject areas

  • Engineering(all)

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