HIGH-EFFICIENCY LONG-PULSE XECL LASER WITH SIMPLE CONFIGURATION AND EFFICIENT LINE NARROWING.

M. Sugii; M. Ando; O. Sugihara; A. Watanabe; K. Sasaki

HIGH-EFFICIENCY LONG-PULSE XECL LASER WITH SIMPLE CONFIGURATION AND EFFICIENT LINE NARROWING.

M. Sugii, M. Ando, O. Sugihara, A. Watanabe, K. Sasaki

Institute of Multidisciplinary Research for Advanced Materials (IMRAM)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Long optical-pulse durations of more than 50 ns with high specific energy are required to operate a small excimer laser oscillator with a narrow linewidth. The authors have demonstrated long-pulsed operation of a discharge-pumped XeCl laser using inductors with no degradation of specific energy or efficiency. An efficient line narrowing of the 0. 0002-angstrom bandwidth with a relatively high-output energy of 4 mJ was also achieved using this device.

Original language	English
Title of host publication	Unknown Host Publication Title
Publisher	Optical Soc of America
Number of pages	1
ISBN (Print)	0936659491
Publication status	Published - 1987 Jan 1

ASJC Scopus subject areas

Engineering(all)

Cite this

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title = "HIGH-EFFICIENCY LONG-PULSE XECL LASER WITH SIMPLE CONFIGURATION AND EFFICIENT LINE NARROWING.",

abstract = "Long optical-pulse durations of more than 50 ns with high specific energy are required to operate a small excimer laser oscillator with a narrow linewidth. The authors have demonstrated long-pulsed operation of a discharge-pumped XeCl laser using inductors with no degradation of specific energy or efficiency. An efficient line narrowing of the 0. 0002-angstrom bandwidth with a relatively high-output energy of 4 mJ was also achieved using this device.",

author = "M. Sugii and M. Ando and O. Sugihara and A. Watanabe and K. Sasaki",

year = "1987",

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AU - Sugii, M.

AU - Ando, M.

AU - Sugihara, O.

AU - Watanabe, A.

AU - Sasaki, K.

PY - 1987/1/1

Y1 - 1987/1/1

N2 - Long optical-pulse durations of more than 50 ns with high specific energy are required to operate a small excimer laser oscillator with a narrow linewidth. The authors have demonstrated long-pulsed operation of a discharge-pumped XeCl laser using inductors with no degradation of specific energy or efficiency. An efficient line narrowing of the 0. 0002-angstrom bandwidth with a relatively high-output energy of 4 mJ was also achieved using this device.

AB - Long optical-pulse durations of more than 50 ns with high specific energy are required to operate a small excimer laser oscillator with a narrow linewidth. The authors have demonstrated long-pulsed operation of a discharge-pumped XeCl laser using inductors with no degradation of specific energy or efficiency. An efficient line narrowing of the 0. 0002-angstrom bandwidth with a relatively high-output energy of 4 mJ was also achieved using this device.

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M3 - Conference contribution

AN - SCOPUS:0023252516

SN - 0936659491

BT - Unknown Host Publication Title

PB - Optical Soc of America

ER -

HIGH-EFFICIENCY LONG-PULSE XECL LASER WITH SIMPLE CONFIGURATION AND EFFICIENT LINE NARROWING.

Abstract

ASJC Scopus subject areas

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