High-density nanoetchpit-array fabrication on Si surface using ultrathin SiO2 mask

Meishoku Koh, Souichi Sawara, Tomomi Goto, Yoshinori Ando, Takahiro Shinada, Iwao Ohdomari

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy