High-density and sub-20-nm GaAs nanodisk array fabricated using neutral beam etching process for high performance QDs devices

Yosuke Tamura, Makoto Igarashi, Mohd Erman Fauzi, Rikako Tsukamoto, Toshiyuki Kaizu, Takayuki Kiba, Ichiro Yamashita, Yoshitaka Okada, Akihiro Murayama, Seiji Samukawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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