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High-density and sub-20-nm GaAs nanodisk array fabricated using neutral beam etching process for high performance QDs devices
Yosuke Tamura, Makoto Igarashi, Mohd Erman Fauzi, Rikako Tsukamoto, Toshiyuki Kaizu, Takayuki Kiba, Ichiro Yamashita, Yoshitaka Okada, Akihiro Murayama, Seiji Samukawa
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution