High density and high reliability chain FeRAM with damage-robust MOCVD-PZT capacitor with SrRuO3/IrO2 top electrode for 64Mb and beyond

O. Hidaka, T. Ozaki, H. Kanaya, Y. Kumura, Y. Shimojo, S. Shuto, Y. Yamada, K. Yahashi, K. Yamakawa, S. Yamazaki, D. Takashima, T. Miyakawa, S. Shiratake, S. Ohtsuki, I. Kunishima, A. Nitayama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

9 Citations (Scopus)

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Engineering & Materials Science