High Aspect Ratio Silicon Structures Produced via Metal-Assisted Chemical Etching and Assembly Technology for Cantilever Fabrication

Research output: Contribution to journalArticlepeer-review

20 Citations (Scopus)

Fingerprint Dive into the research topics of 'High Aspect Ratio Silicon Structures Produced via Metal-Assisted Chemical Etching and Assembly Technology for Cantilever Fabrication'. Together they form a unique fingerprint.

Engineering & Materials Science