High-aspect-ratio and self-sensing probe for AMF based on micro-fabrication

Gaofa He, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The cantilever with a high-aspect-ratio and long probe is a key sub-system of the atomic force microscopes (AFMs) used to measure the surface aspect of the mechanical and optical devices. In this paper, a novel cantilever with a 50μm-length-probe and self-sensing piezoresistor was designed; and based on the micro fabrication technology, the processes were planned. The dynamic and static characteristics of the cantilever were analyzed on theory and finite element method (FEM). The results show that the length of the probe has no effect on the cantilever's dynamic and static performance.

Original languageEnglish
Title of host publicationEquipment Manufacturing Technology and Automation
Pages1645-1648
Number of pages4
DOIs
Publication statusPublished - 2011
Event2011 International Conference on Advanced Design and Manufacturing Engineering, ADME 2011 - Guangzhou, China
Duration: 2011 Sep 162011 Sep 18

Publication series

NameAdvanced Materials Research
Volume317-319
ISSN (Print)1022-6680

Other

Other2011 International Conference on Advanced Design and Manufacturing Engineering, ADME 2011
CountryChina
CityGuangzhou
Period11/9/1611/9/18

Keywords

  • Atomic force microscope (AFM)
  • Finite element method (FEM)
  • Micro-fabrication
  • Scanning probe

ASJC Scopus subject areas

  • Engineering(all)

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