High accuracy profile measurement of a machined surface by the combined method

Wei Gao, Satoshi Kiyono

Research output: Contribution to journalArticle

73 Citations (Scopus)

Abstract

The combined method, which combines the generalized 2-point method with the inclination method, has been developed to measure profiles that include high-frequency components whose spatial wavelengths are shorter than the probe interval. It is suitable for measuring discontinuous profiles that include step-wise variations and abrupt changes. In this paper, we discuss the influences of the setting error of the probe interval, and the positioning error of sampling when we use the combined method to measure a step-wise profile. Results of theoretical analyses show that these errors cause the same kind of evaluation errors in the profile measured with the combined method, and large profile evaluation errors are caused by the edge part of a step-wise profile. The value of the profile evaluation error is concerned with the aperture size of the displacement probe and the height of the step-wise profile. The influence of the gain errors of the probe is also investigated. An automatic selection method that can select the standard area properly and quickly is developed to improve the accuracy of the combined method. A machined surface with a step-wise profile is measured by using two capacitance-type displacement probes. Experimental results that confirm the effectiveness of the combined method are also presented.

Original languageEnglish
Pages (from-to)55-64
Number of pages10
JournalMeasurement: Journal of the International Measurement Confederation
Volume19
Issue number1
DOIs
Publication statusPublished - 1996 Sep 1

Keywords

  • 2-Point method
  • Error analysis
  • Inclination method
  • Metrology
  • Scanning method
  • Software datum
  • Step-wise profile
  • Straightness

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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