High accuracy high spatial resolution and real-time CMOS proximity capacitance image sensor technology and its applications

Rihito Kuroda, Masahiro Yamamoto, Yuki Sugama, Yoshiaki Watanabe, Manabu Suzuki, Tetsuya Goto, Toshiro Yasuda, Shinichi Murakami, Yayoi Yokomichi, Hiroshi Hamori, Shigetoshi Sugawa

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Engineering & Materials Science