High accuracy high spatial resolution and real-time CMOS proximity capacitance image sensor technology and its applications

Rihito Kuroda, Masahiro Yamamoto, Yuki Sugama, Yoshiaki Watanabe, Manabu Suzuki, Tetsuya Goto, Toshiro Yasuda, Shinichi Murakami, Yayoi Yokomichi, Hiroshi Hamori, Shigetoshi Sugawa

Research output: Contribution to journalArticlepeer-review

Abstract

This paper presents a CMOS proximity capacitance image sensor technology achieving 0.1aF detection accuracy with high spatial resolution with real-time imaging capability for industrial, life science, and biometric applications. The proposed image sensor circuits, its working principle and device structures are described in this paper, and additionally, we discuss the foreseen technology roadmap. The fabricated chips with 16µm pitch pixels achieved a 0.1aF detection accuracy with the input voltage of 20V, thanks to the employed noise reduction technology. The examples of capacitance imaging using the fabricated CMOS proximity capacitance image sensor are demonstrated.

Original languageEnglish
Pages (from-to)122-127
Number of pages6
JournalITE Transactions on Media Technology and Applications
Volume9
Issue number2
DOIs
Publication statusPublished - 2021

Keywords

  • Image sensor
  • Inspection equipment
  • Noise reduction
  • Proximity capacitance

ASJC Scopus subject areas

  • Signal Processing
  • Media Technology
  • Computer Graphics and Computer-Aided Design

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