Heterogeneous integration of MEMS on LSI

Masayoshi Esashi, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)372-375
Number of pages4
JournalJournal of Japan Institute of Electronics Packaging
Volume20
Issue number6
DOIs
Publication statusPublished - 2017 Sep

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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