TY - GEN
T1 - Heterogeneous 3D integration technology and new 3D LSIs
AU - Koyanagi, Mitsumasa
AU - Ri, Kanuku
AU - Fukushima, Takafumi
AU - Tanaka, Tetsu
PY - 2012/12/1
Y1 - 2012/12/1
N2 - A new 3-D integration technology and heterogeneous integration technology called a super-chip integration is described. A number of known good dies (KGDs) with different sizes and different devices are simultaneously aligned and bonded onto lower chips or wafer by a chip self-assembly method using the surface tension of liquid in the super-chip integration. Possibilities for new system-on-a chip and heterogeneous LSIs by 3D super-chip integration such as 3D stacked multicore processor with self-test and self-repair function, GPU stacked 3D image sensor with extremely fast processing speed and 3D stacked reconfigurable processor with spin memory are discussed.
AB - A new 3-D integration technology and heterogeneous integration technology called a super-chip integration is described. A number of known good dies (KGDs) with different sizes and different devices are simultaneously aligned and bonded onto lower chips or wafer by a chip self-assembly method using the surface tension of liquid in the super-chip integration. Possibilities for new system-on-a chip and heterogeneous LSIs by 3D super-chip integration such as 3D stacked multicore processor with self-test and self-repair function, GPU stacked 3D image sensor with extremely fast processing speed and 3D stacked reconfigurable processor with spin memory are discussed.
UR - http://www.scopus.com/inward/record.url?scp=84874817670&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84874817670&partnerID=8YFLogxK
U2 - 10.1109/ICSICT.2012.6467716
DO - 10.1109/ICSICT.2012.6467716
M3 - Conference contribution
AN - SCOPUS:84874817670
SN - 9781467324724
T3 - ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings
BT - ICSICT 2012 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, Proceedings
T2 - 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2012
Y2 - 29 October 2012 through 1 November 2012
ER -