Heteroepitaxial growth of perovskite CaTaO2N thin films by nitrogen plasma-assisted pulsed laser deposition

Daichi Oka, Yasushi Hirose, Tomoteru Fukumura, Tetsuya Hasegawa

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)


We demonstrated heteroepitaxial growth of perovskite CaTaO2N on SrTiO3 (100) substrates by using nitrogen plasma assisted pulsed laser deposition (NPA-PLD). The CaTaO2N films grew coherently on SrTiO3 substrates, showing a layer-by-layer growth mode in the initial stages. The obtained films possessed high crystallinity, a sharp film/substrate interface, and flat surfaces. Impedance measurements revealed that CaTaO2N has a much smaller dielectric constant than those of SrTaO2N or BaTaO2N. These results indicate that heteroepitaxial growth by NPA-PLD is a promising approach for preparing high-quality perovskite oxynitride single crystals, which are desirable for investigation of electrical properties of perovskite oxynitrides.

Original languageEnglish
Pages (from-to)87-90
Number of pages4
JournalCrystal Growth and Design
Issue number1
Publication statusPublished - 2014 Jan 2
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics

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