Hermitically sealed Ultra-Miniature fiber-optic pressure sensor

S. Nakamura, T. Matsunaga, K. Totsu, M. Esashi, Y. Haga

Research output: Contribution to conferencePaper

1 Citation (Scopus)

Abstract

Ultra-Miniature fiber optic sensor of 125 μm diameter has been developed by using MEMS fabrication techniques. The Fabry-Perot cavity is formed at the end of an optical fiber. The pressure induced deformation of the Fabry-Perot cavity diaphragm alters the cavity length. Fabricated sensor structures exhibited temperature dependency. To solve this problem, hermetic sealing using a thin-film solder bonding and Cr thin-film deposition on the sidewall of the sensor have been tried.

Original languageEnglish
Pages1553-1556
Number of pages4
Publication statusPublished - 2006 Dec 1
Event13th International Display Workshops, IDW '06 - Otsu, Japan
Duration: 2006 Dec 62006 Dec 6

Other

Other13th International Display Workshops, IDW '06
CountryJapan
CityOtsu
Period06/12/606/12/6

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Radiology Nuclear Medicine and imaging
  • Atomic and Molecular Physics, and Optics

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