Fingerprint
Dive into the research topics of 'Helicon-wave-excited plasma sputtering deposition of Ga-doped ZnO transparent conducting films'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Helicon-wave-excited plasma sputtering deposition of Ga-doped ZnO transparent conducting films
Mutsumi Sugiyama, Akira Murayama, Takashi Imao, Keita Saiki, Hisayuki Nakanishi, Shigefusa F. Chichibu
Research output: Contribution to journal › Article › peer-review
11
Citations
(Scopus)