Helicon-wave-excited plasma sputtering deposition of Ga-doped ZnO transparent conducting films

Mutsumi Sugiyama, Akira Murayama, Takashi Imao, Keita Saiki, Hisayuki Nakanishi, Shigefusa F. Chichibu

Research output: Contribution to journalArticle

11 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy