Heat-resistant polyarylates for waveguide-type device application

Okihiro Sugihara, Masahiro Tomiki, Hisashi Fujimura, Chikara Egami, Naomichi Okamoto, Takamasa Akizuki, Hiromasa Shirai

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Abstract

Polyarylates (PARs) with high glass transition temperature (Tg) of over 200 °C are newly synthesized and used for waveguide-type device application. Thermal and optical properties of PARs are investigated, and results indicate that PARs show high thermal stability as well as high optical transparency in the visible region. High-resolution relief gratings on PAR thin films are fabricated by a direct electron-beam (EB) writing technique together with thermal development. Using a reactive-ion-etching (RIE) technique, the waveguide channel ridge was fabricated.

Original languageEnglish
Pages (from-to)L1174-L1176
JournalJapanese journal of applied physics
Volume39
Issue number11 B
DOIs
Publication statusPublished - 2000 Nov 15

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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  • Cite this

    Sugihara, O., Tomiki, M., Fujimura, H., Egami, C., Okamoto, N., Akizuki, T., & Shirai, H. (2000). Heat-resistant polyarylates for waveguide-type device application. Japanese journal of applied physics, 39(11 B), L1174-L1176. https://doi.org/10.1143/jjap.39.l1174