Hard X-ray photoelectron spectroscopy analysis for organic-inorganic hybrid materials formation

Ken Cho, Kosuke Takenaka, Yuichi Setsuhara, Masaharu Shiratani, Makoto Sekine, Masaru Hori, Eiji Ikenaga, Hiroki Kondo, Osamu Nakatsuka, Shigeaki Zaima

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Interactions of nitrogen plasmas with polymer surfaces were investigated using hard x-ray photoelectron spectroscopy (HXPES) to complete depth analyses of the chemical bonding states in the nano-surface layer of polymethylmethacrylate (PMMA) films via. The PMMA films were exposed to the nitrogen plasmas sustained via inductive coupling of radio-frequency (RF) power with multiple low-inductance antenna (LIA) modules. The etching rate of the PMMA films was 38 nm/min. The surface roughness of PMMA increased from 0.3 nm to 0.7 nm with increased exposure time. The HXPES was carried out for non-destructive depth analysis of chemical bonding states in the nano-surface layer of PMMA films. The HXPES results indicated that nitrogen functionalities were formed in the shallower regions up to about 27 nm from the surface without showing significant degradation of the molecular structure of PMMA due to nitrogen plasma exposure.

Original languageEnglish
Title of host publicationCharacterization and Control of Interfaces for High Quality Advanced Materials III - Proc. 3rd Int. Conf. on Characterization and Control of Interfaces for High Quality Advanced Materials,ICCCI2009
PublisherAmerican Ceramic Society
Pages183-188
Number of pages6
ISBN (Print)9780470909171
DOIs
Publication statusPublished - 2010 Jan 1
Event3rd International Conference on Characterization and Control of Interfaces for High Quality Advanced Materials, ICCCI2009 - Kurashiki, Japan
Duration: 2009 Sep 62009 Sep 9

Publication series

NameCeramic Transactions
Volume219
ISSN (Print)1042-1122

Other

Other3rd International Conference on Characterization and Control of Interfaces for High Quality Advanced Materials, ICCCI2009
CountryJapan
CityKurashiki
Period09/9/609/9/9

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry

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    Cho, K., Takenaka, K., Setsuhara, Y., Shiratani, M., Sekine, M., Hori, M., Ikenaga, E., Kondo, H., Nakatsuka, O., & Zaima, S. (2010). Hard X-ray photoelectron spectroscopy analysis for organic-inorganic hybrid materials formation. In Characterization and Control of Interfaces for High Quality Advanced Materials III - Proc. 3rd Int. Conf. on Characterization and Control of Interfaces for High Quality Advanced Materials,ICCCI2009 (pp. 183-188). (Ceramic Transactions; Vol. 219). American Ceramic Society. https://doi.org/10.1002/9780470917145.ch27