Hard X-ray multilayer zone plate with 25-nm outermost zone width

H. Takano, K. Sumida, H. Hirotomo, T. Koyama, S. Ichimaru, T. Ohchi, H. Takenaka, Y. Kagoshima

Research output: Contribution to journalConference articlepeer-review

Abstract

We have improved the performance of a previously reported multilayer zone plate by reducing its outermost zone width, using the same multilayer materials (MoSi2 and Si) and fabrication technique. The focusing performance was evaluated at the BL24XU of SPring-8 using 20-keV X-rays. The line spread function (LSF) in the focal plane was measured using a dark-field knife-edge scan method, and the point spread function was obtained from the LSF through a tomographic reconstruction principle. The spatial resolution was estimated to be 30 nm, which is in relatively good agreement with the calculated diffraction-limited value of 25 nm, while the measured diffraction efficiency of the +1st order was 24%.

Original languageEnglish
Article number012052
JournalJournal of Physics: Conference Series
Volume849
Issue number1
DOIs
Publication statusPublished - 2017 Jun 14
Event13th International X-ray Microscopy Conference, XRM 2016 - Oxford, United Kingdom
Duration: 2016 Aug 152016 Aug 19

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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