Hands-on-access facility for MEMS and semiconductor prototyping at Tohoku University

Kentaro Totsu, Masaaki Moriyama, Masayoshi Esashi

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
Publication statusPublished - 2012 Jan 1
EventSmart Systems Integration Conference 2012, SSI 2012 - Zurich, Switzerland
Duration: 2012 Mar 212012 Mar 22

Conference

ConferenceSmart Systems Integration Conference 2012, SSI 2012
CountrySwitzerland
CityZurich
Period12/3/2112/3/22

ASJC Scopus subject areas

  • Artificial Intelligence
  • Computer Networks and Communications
  • Computer Science Applications

Cite this