HAL SAW resonators using LiTaO3 thin plate on quartz substrate

Michio Kadota, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)

Abstract

Surface acoustic wave (SAW) resonators with a moderate bandwidth and a large impedance ratio are obtained by Hetero Acoustic Layer (HAL) structure combing a LiTaO3 (LT) thin plate and the substrate, which has a high velocity of leaky SAW and a small frequency temperature coefficient (TCF). In this study, a new type of HAL SAW resonators were fabricated using 0.5-1 μm thick 42oYX or 20oYX LT and 42o45'YX or 40oY90oX quartz bonded together. An impedance ratio of 65-70 dB and a TCF of -26 ppm/oC were measured. Those impedance ratios are 13-21 dB better than that of a standard 42oYX LT SAW resonator fabricated in the same facility.

Original languageEnglish
Title of host publication2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages206-209
Number of pages4
ISBN (Electronic)9781538629161
DOIs
Publication statusPublished - 2017 Oct 27
Event2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Besancon, France
Duration: 2017 Jul 92017 Jul 13

Publication series

Name2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings

Other

Other2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017
CountryFrance
CityBesancon
Period17/7/917/7/13

Keywords

  • LiTaO
  • SAW resonator
  • TCF
  • hetero acoustic layer
  • impedance ratio
  • quartz

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation

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