Growth-temperature dependence of the Li/Nb ratio in LPE-grown LiNbo3 films estimated by second-harmonic generation

T. Kawaguchi, M. Imaeda, R. Ohuchi, M. Minakata, T. Taniuchi, T. Fukuda

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)

Abstract

The relationship between the Li/Nb ratio of liquid-phase epitaxial (LPE) grown LiNbO3 films and the growth temperature is investigated by means of second-harmonic generation measurements. Uniform 3-inch-wafer-size epitaxial films, which are available in conventional device fabrication processes, were successfully grown.

Original languageEnglish
Pages (from-to)493-496
Number of pages4
JournalJournal of Crystal Growth
Volume166
Issue number1-4
DOIs
Publication statusPublished - 1996 Sep

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

Fingerprint Dive into the research topics of 'Growth-temperature dependence of the Li/Nb ratio in LPE-grown LiNbo<sub>3</sub> films estimated by second-harmonic generation'. Together they form a unique fingerprint.

Cite this