Growth rate of TiN films by chemical-vapour-deposition

Noboru Yoshikawa, Kazuyuki Higashino, Atsushi Kikuchi

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Growth rate of TiN films by chemical-vapour-deposition'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds