We have investigated the pulsed laser deposition (PLD) growth processes of spinel lithium titanates based on the preparation of Li 4Ti 5O 12 and LiTi 2O 4 from a Li 4Ti 5O 12 target. The Li/Ti atomic ratio of the species arriving at substrate during the deposition was only ∼0.5. The LiTi 2O 4 epitaxial thin films fabricated on MgAl 2O 4 (111) substrate exhibited high conductivity at room temperature (∼3.0 × 10 3 Ω -1 cm -1) and a superconducting transition temperature of ∼12 K. These values are the highest reported for epitaxial thin films. Our results demonstrate the importance of the target composition, providing further insights into the Li-containing metal oxide deposition processes using PLD.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)