Growth of transparent conducting Nb-doped anatase TiO2 thin films on glass using seed layers

N. Yamada; T. Hitosugi; S. Nakao; J. Kasai; Y. Hirose; N. L.H. Hoang; T. Shimada; T. Hasegawa

Growth of transparent conducting Nb-doped anatase TiO₂ thin films on glass using seed layers

N. Yamada, T. Hitosugi, S. Nakao, J. Kasai, Y. Hirose, N. L.H. Hoang, T. Shimada, T. Hasegawa

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We report recent progress on sputter-growth of Nb-doped anatase TiO ₂ (TNO) polycrystalline films, being a promising ITO-alternative transparent conductor. In order to achieve low resistivity (ρ) in TNO, it is necessary to grow anatase phase under reducing atmospheres. However, growth of TNO polycrystalline films on glass under such conditions tends to stabilize rutile phase with higher resistivity. To overcame this difficulty, we have developed a bi-layer technique using a TNO self seed-layer, which prevents the formation of the rutile phase even under reducing growth conditions. As a result, we succeeded in directly fabricating TNO polycrystalline films with ρ of ∼1×10³ Ω cm and visible transmittance of 60 ∼ 80%, although we still need to further improve these properties towards practical applications. By comparing dc transport properties with optically deduced ones, we discuss material parameters that limit carrier transport in presently obtained TNO polycrystalline films.

Original language	English
Title of host publication	Transparent Conductors and Semiconductors for Optoelectronics
Pages	15-24
Number of pages	10
Publication status	Published - 2009
Event	2009 MRS Fall Meeting - Boston, MA, United States Duration: 2009 Nov 30 → 2009 Dec 4

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	1109
ISSN (Print)	0272-9172

Other

Other	2009 MRS Fall Meeting
Country/Territory	United States
City	Boston, MA
Period	09/11/30 → 09/12/4

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

Growth of transparent conducting Nb-doped anatase TiO₂ thin films on glass using seed layers. / Yamada, N.; Hitosugi, T.; Nakao, S.; Kasai, J.; Hirose, Y.; Hoang, N. L.H.; Shimada, T.; Hasegawa, T.

Transparent Conductors and Semiconductors for Optoelectronics. 2009. p. 15-24 (Materials Research Society Symposium Proceedings; Vol. 1109).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yamada, N, Hitosugi, T, Nakao, S, Kasai, J, Hirose, Y, Hoang, NLH, Shimada, T & Hasegawa, T 2009, Growth of transparent conducting Nb-doped anatase TiO₂ thin films on glass using seed layers. in Transparent Conductors and Semiconductors for Optoelectronics. Materials Research Society Symposium Proceedings, vol. 1109, pp. 15-24, 2009 MRS Fall Meeting, Boston, MA, United States, 09/11/30.

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AU - Yamada, N.

AU - Hitosugi, T.

AU - Nakao, S.

AU - Kasai, J.

AU - Hirose, Y.

AU - Hoang, N. L.H.

AU - Shimada, T.

AU - Hasegawa, T.

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N2 - We report recent progress on sputter-growth of Nb-doped anatase TiO 2 (TNO) polycrystalline films, being a promising ITO-alternative transparent conductor. In order to achieve low resistivity (ρ) in TNO, it is necessary to grow anatase phase under reducing atmospheres. However, growth of TNO polycrystalline films on glass under such conditions tends to stabilize rutile phase with higher resistivity. To overcame this difficulty, we have developed a bi-layer technique using a TNO self seed-layer, which prevents the formation of the rutile phase even under reducing growth conditions. As a result, we succeeded in directly fabricating TNO polycrystalline films with ρ of ∼1×103 Ω cm and visible transmittance of 60 ∼ 80%, although we still need to further improve these properties towards practical applications. By comparing dc transport properties with optically deduced ones, we discuss material parameters that limit carrier transport in presently obtained TNO polycrystalline films.

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