Growth of transparent conducting Nb-doped anatase TiO2 thin films on glass using seed layers

N. Yamada, T. Hitosugi, S. Nakao, J. Kasai, Y. Hirose, N. L.H. Hoang, T. Shimada, T. Hasegawa

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    We report recent progress on sputter-growth of Nb-doped anatase TiO 2 (TNO) polycrystalline films, being a promising ITO-alternative transparent conductor. In order to achieve low resistivity (ρ) in TNO, it is necessary to grow anatase phase under reducing atmospheres. However, growth of TNO polycrystalline films on glass under such conditions tends to stabilize rutile phase with higher resistivity. To overcame this difficulty, we have developed a bi-layer technique using a TNO self seed-layer, which prevents the formation of the rutile phase even under reducing growth conditions. As a result, we succeeded in directly fabricating TNO polycrystalline films with ρ of ∼1×103 Ω cm and visible transmittance of 60 ∼ 80%, although we still need to further improve these properties towards practical applications. By comparing dc transport properties with optically deduced ones, we discuss material parameters that limit carrier transport in presently obtained TNO polycrystalline films.

    Original languageEnglish
    Title of host publicationTransparent Conductors and Semiconductors for Optoelectronics
    Pages15-24
    Number of pages10
    Publication statusPublished - 2009
    Event2009 MRS Fall Meeting - Boston, MA, United States
    Duration: 2009 Nov 302009 Dec 4

    Publication series

    NameMaterials Research Society Symposium Proceedings
    Volume1109
    ISSN (Print)0272-9172

    Other

    Other2009 MRS Fall Meeting
    CountryUnited States
    CityBoston, MA
    Period09/11/3009/12/4

    ASJC Scopus subject areas

    • Materials Science(all)
    • Condensed Matter Physics
    • Mechanics of Materials
    • Mechanical Engineering

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