Abstract
We have studied the growth of silicon nanowires (SiNWs) by means of transmission electron microscopy. SiNWs are grown from nanocatalysts via the Vapor-Liquid-Solid (VLS) mechanism using silane (SiH4) gas as a source gas. The nanocatalysts are prepared on a hydrogen (H)-terminated Si surface. We have examined the formation mechanism of nanocatalysts on H-terminated surface and have observed several structural variants of SiNWs. According to the study we have suggested that many structural variations of SiNWs are possible, which modify the structural properties of SiNWs to great extents.
Original language | English |
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Pages (from-to) | i25-i29 |
Journal | Journal of Electron Microscopy |
Volume | 54 |
Issue number | SUPPL. 1 |
DOIs | |
Publication status | Published - 2005 Sep |
Keywords
- CL spectroscopy
- H-terminated Si surface
- HRTEM
- Nanocatalysts
- Silicon nanowires
- Structural variations of silicon nanowires
ASJC Scopus subject areas
- Instrumentation