Growth of GaN on SiC/Si substrates using AlN buffer layer by hot-mesh CVD

Kazuyuki Tamura, Yuichiro Kuroki, Kanji Yasui, Maki Suemitsu, Takashi Ito, Tetsuro Endou, Hideki Nakazawa, Yuzuru Narita, Masasuke Takata, Tadashi Akahane

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16 Citations (Scopus)

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Chemical Compounds

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Physics & Astronomy