TY - JOUR
T1 - Growth of Ag micro/nanoparticles using stress migration from multilayered metallic structure
AU - Lu, Yebo
AU - Li, Yuan
AU - Saka, Masumi
N1 - Funding Information:
This work was financially supported by JSPS KAKENHI Grant-in-Aid for Scientific Research (B) No. 26289001 . Y. Lu acknowledges the grants from the National Natural Science Foundation of China ( 51305165 ) and Qianjiang Talents Project of Zhejiang Province (QJD1302007) for support to visit Tohoku University. A part of this work was performed at the Micro/Nano-Machine Research and Education Center of Tohoku University.
PY - 2015/10/1
Y1 - 2015/10/1
N2 - A multilayered metallic structure, consisting of Cu foil and subsequently deposited Ag thin film covered with a passivation layer, was proposed to fabricate Ag micro/nanoparticles by stress migration. With employing a ductile Pt or brittle TiN thin film as passivation, Ag micro/nanoparticles were successfully fabricated by annealing the corresponding multilayered structure. The relationship between characteristics (average diameter, number and volume) of the formed Ag micro/nanoparticles and the annealing temperature was discussed. On this basis, the growth mechanism was developed, which indicates that the dimension of Ag particles was mainly dominated by the different pathways for the migration of diffused Ag atoms in the passivation layers of Pt and TiN and the annealing temperature.
AB - A multilayered metallic structure, consisting of Cu foil and subsequently deposited Ag thin film covered with a passivation layer, was proposed to fabricate Ag micro/nanoparticles by stress migration. With employing a ductile Pt or brittle TiN thin film as passivation, Ag micro/nanoparticles were successfully fabricated by annealing the corresponding multilayered structure. The relationship between characteristics (average diameter, number and volume) of the formed Ag micro/nanoparticles and the annealing temperature was discussed. On this basis, the growth mechanism was developed, which indicates that the dimension of Ag particles was mainly dominated by the different pathways for the migration of diffused Ag atoms in the passivation layers of Pt and TiN and the annealing temperature.
KW - Micro/nanoparticles
KW - Multilayered metallic structure
KW - Silver
KW - Stress migration
UR - http://www.scopus.com/inward/record.url?scp=84969334468&partnerID=8YFLogxK
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U2 - 10.1016/j.apsusc.2015.06.037
DO - 10.1016/j.apsusc.2015.06.037
M3 - Article
AN - SCOPUS:84969334468
VL - 351
SP - 1011
EP - 1015
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
ER -